Abstract: ICP-MS has the advantages of high sensitivity,low detection limit,wide linear range,and is widely used in the determination of trace trace trace elements in various types of samples. But because of its strict requirements for the total amount of dissolved solids (TDS),and 70Zn interfere 70Ge, 72Cl2 interfere 72Ge in the determination. The above reasons are limited to the determination of germanium in ICP-MS.In this method,the total dissolved solids (TDS) of the solution can be reduced,and the sample can be used to select the appropriate isotopes. The detection limit was 0.008 g/g and the precision (RSD) was between 8.98% and 3.09%,and the recovery rate was between 103.7% and 94.8%,which could meet the accurate and rapid determination of germanium in rock samples.